May 21, 2024  
2018-2019 Undergraduate and Graduate Catalog 
2018-2019 Undergraduate and Graduate Catalog [ARCHIVED CATALOG]

CH E 532 - Microfabrication and Microfluidics Technology

(3 units)

Prerequisites: CH E 320 , CHEM 227 , MATH 370A  or CH E 480  all with a grade of “C” or better or consent of instructor.
Fundamentals of major microfabrication techniques for device construction and microfluidics technology. Topics: photolithography, wet/dry etching, metal/dielectric deposition, soft lithography, diffusion/mixing/separation in microfluidic devices, and chip-to-world interfaces. Graduate students need to do more assignments.

Letter grade only (A-F). (Lecture-Problems 3 hours). CH E 432