E E 436 - Microfabrication and Nanotechnology

(3 units)

Prerequisites: E E 330 and (PHYS 254 or E E 220); or MAE 300 all with a grade of “C” or better.
Techniques and the technology of miniaturization of electrical, mechanical, optical, and opto-electronic devices in sizes from millimeters to nanometers. Design examples of sensors, microlenses, cantilevers, and micromotors, process fabrication. Additional projects required for E E 536.

Letter grade only (A-F). (Lecture-problems 3 hours) Double Numbered with: E E 536