CH E 432 - Microfabrication and Microfluidics Technology

(3 units)

Prerequisite(s): (CH E 320 or C E 335 ) and (CHEM 227 or CHEM 220A or C E 364) and (MATH 370A or CH E 480) all with a grade of “C” or better.
Fundamentals of major microfabrication techniques for device construction and microfluidics technology. Topics: photolithography, wet/dry etching, metal/dielectric deposition, soft lithography, diffusion/mixing/separation in microfluidic devices, and chip-to-world interfaces. Graduate students need to do more assignments.

Letter grade only (A-F). (Lecture-problems 3 hours). Double Numbered with: CH E 532