CH E 532 - Microfabrication and Microfluidics Technology

(3 units)

Prerequisite: Open to Chemical Engineering MS, Engineering MS, Aerospace Engineering MS, or Mechanical Engineering MS students only.
Fundamentals of major microfabrication techniques for device construction and microfluidics technology. Topics: photolithography, wet/dry etching, metal/dielectric deposition, soft lithography, diffusion/mixing/separation in microfluidic devices, and chip-to-world interfaces. Graduate students need to do more assignments.

Letter grade only (A-F). (Lecture-Problems 3 hours). Double Numbered with: CH E 432